MEMS Product Engineering   / ; Ortloff, Dirk, ; Schmidt, Thilo.; Hahn, Kai.; Bieniek, Tomasz.; Janczyk, Grzegorz. -- Vienna :Springer Vienna :;Imprint: Springer,2014.

xxvi, 195 p. :

Introduction -- Introduction to Product Engineering -- Micro- and Nano Systems - A World of its Own -- MEMS Product Engineering -- Methodology -- MEMS PE Infrastructure Components -- Application of the Methodology - A Sample Scenario -- Details for Managing a Project.

ISBN 9783709107065