Poly-SiGe for MEMS-above-CMOS Sensors   / Gonzalez Ruiz, Pilar.; De Meyer, Kristin.; Witvrouw, Ann. -- Dordrecht :Springer Netherlands :;Imprint: Springer,2014.

xvi, 199 p. :

Acknowledgements -- Abstract -- Symbols and Abbreviations -- Introduction -- Poly-SiGe As Piezoresistive Material -- Design of a Poly-SiGe Piezoresistive Pressure Sensor -- The Pressure Sensor Fabrication Process -- Sealing of Surface Micromachined Poly-SiGe Cavities -- Characterization of Poly-SiGe pressure sensors -- CMOS Integrated Poly-SiGe Piezoresistive Pressure Sensor -- Conclusions And Future Work -- Appendix A -- Appendix B -- Appendix C -- Appendix D.

ISBN 9789400767997