Design, Modeling and Control of Nanopositioning Systems   / Fleming, Andrew J.; Leang, Kam K. -- Cham :Springer International Publishing :;Imprint: Springer,2014.

xvi, 411 p. :

Introduction -- Piezoelectric Transducers -- Types of Nanopositioners -- Mechanical Design: Flexure-based Nanopositioners -- Position Sensors -- Shunt Control -- Feedback Control -- Force Feedback Control -- Feedforward Control -- Command Shaping -- Hysteresis Modeling and Control -- Charge Drives -- Noise in Nanopositioning Systems -- Electrical Considerations.

ISBN 9783319066172